Micro System Design and Manufacturing Center

Manufacturing high value added parts – especially in biomedical, electronics, and defense industries – has become a crucial component of many countries’ economies. As a result, the development of micro manufacturing technologies and the manufacturing of precision micro scale parts have attracted significant attention among researchers academia and industry over the past 15 years. Optical lithography based techniques have been used to manufacture micro scale parts for a long time. These techniques are economically feasible when large number of micro scale parts are produced from silicone based materials. However, current demand requires low batch sizes and parts made from engineering materials (metals, polymers, etc). In order to be able to answer this demand, micro machining techniques have been developed in order to machine parts with three dimensional micro features on a wide range of engineering materials either by using mechanical micro machining using cutting tools with defined or undefined cutting edges or by using energy based techniques such as laser micro machining and electro-discharge machining.


Micro System Design and Manufacturing Center employs state of the art manufacturing facilities capable of production and measurement of micro parts.

Moore Nanotechnology 350 FG Freeform Generator

Sodick AP250 L Wire EDM

Microtools Hybrid Micro Milling and Micro Electro Discharge Machining

Desma Micro Plastic Injection Machine

Measurement Devices:

Zygo Verifire Interferometer System

Zeiss Micura Coordinate Measurement Machine

Keyence VHX 1000 Digital Microscope

Keyence VW 600 High Speed Microscope

Keyence VK-100 Laser Scanning Microscope

Polytec Laser Vibrometer

Kistler Mini Force Dynamometer

National Instruments Data Acquisition Sytems

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