Development of a Three-axis Micro/nano-positioning System

(Completed Project)





Project Duration:

Start Date: October 1st, 2010
Completion Date: October 1st, 2012


There is a growing interest for precision positioning systems from various micro-/nano-technology applications. Three-axis high-precision positioning is required in micro-/nano-scale manufacturing and assembly, optical component alignment systems, scanning microscopy applications, nano-particle placement applications, cell/tissue engineering and etc. In the coming years, more high-precision positioning systems will be needed to address the increasing demand for micro-/nano-technology equipment. The main objective of the project is to design and integrate a high-precision three-axis stage using modular axis sliders. A MIMO controller will be designed for considering the overall dynamics of the device rather than the individual axis dynamics.

Related Publications:

    Journal Papers

  • Erva Ulu,, Nurcan Gecer-Ulu,, Çakmakcı, M. (2014). "Development and Validation of an Adaptive Method to Generate High-Resolution Quadrature Encoder Signals", Journal Dynamic Systems Measurement and Control, v.136(3) p.034503

  • Book Chapters

  • Çakmakcı, M., Kızıltaş-Şendür, G., Durak, U. (2017). "Simulation-Based Engineering", Guide to Simulation-Based Disciplines / Springer Publications, July
    DOI: 10.1007/978-3-319-61264-5_3

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