DEVELOPMENT OF A THREE-AXIS MICRO/NANO-POSITIONING SYSTEM

Tamamlanmış Proje

TUBITAK

PROJECT DURATION

Start Date: October 1st, 2010
Completion Date: October 1st, 2012

SUMMARY

There is a growing interest for precision positioning systems from various micro-/nano-technology applications. Three-axis high-precision positioning is required in micro-/nano-scale manufacturing and assembly, optical component alignment systems, scanning microscopy applications, nano-particle placement applications, cell/tissue engineering and etc. In the coming years, more high-precision positioning systems will be needed to address the increasing demand for micro-/nano-technology equipment. The main objective of the project is to design and integrate a high-precision three-axis stage using modular axis sliders. A MIMO controller will be designed for considering the overall dynamics of the device rather than the individual axis dynamics.