Devam Eden Proje

Marie Curie Career Integration Grant
Marie Curie Kariyer Entegrasyon Fonu


Start Date: March 1st, 2014
Expected Completion Date: March 1st, 2018


Nano-electromechanical Systems (NEMS) are extremely sensitive detectors of physical parameters. In recent years, the applications of NEMS in mass sensing has been gaining importance through demonstrations of mass sensitivities at the single atom levels and mass measurements of single protein molecules. These demonstrations show that is possible to perform sample analysis through NEMS mass measurements (NEMS Mass Spectrometry) especially for physiologically important large molecules and biostructures. However the NEMS literature so far have always treated these large molecules as “point-particles”. Considering the miniaturization trend of NEMS and targeted large molecules, this assumption is no more valid.The project will be the first step for the development of a novel, powerful NEMS sensing tool.

Profiling with Nanoelectromechanical Systems


  • Journal Papers:
  • Uzay Tefek, Burak Sari, Hashim Z. Alhmoud, M. Selim Hanay (2023). "Permittivity-Based Microparticle Classification by the Integration of Impedance Cytometry and Microwave Resonators",
    Advanced Materials
    , v.2023(35) p.46 (2304072)
  • Batuhan E, Kaynak, Mohammed Alkhaled, Enise Kartal, C Yanik, M. Selim Hanay (2023). "Atmospheric Pressure Mass Spectrometry by Single-Mode Nanoelectromechanical Systems",
    Nano Letters
    , v.23(18) p.8553–8559 
  • Y. Ceren Alatas, Uzay Tefek, Burak Sari, M. Selim Hanay (2024). "Microwave Resonators Enhanced With 3D Liquid-Metal Electrodes for Microparticle Sensing in Microfluidic Applications",
    IEEE Journal of Microwave
    , v.4(1) p.139 - 146
  • E Erdem, B Demiralp, HS Pisheh, P Firoozy, AH Karakurt, MS Hanay (2023). "Observing Inter-well and Intra-well Oscillations in Buckled Nanomechanical Systems Enabled by Image Processing",
    Journal of Applied Physics
    , v.134 p.224302
  • M. Çağatay Karakan, Atakan B. Ari, Mehmet Kelleci, Cenk Yanık, Ismet I. Kaya, Öznur Taştan, M. Selim Hanay (2023). "Vapor Sensing of Colorectal Cancer Biomarkers in Isolation by Bare and Functionalized Nanoelectromechanical Sensors",
    IEEE Sensors Journal
    , v.vol. 23,(no. 18,) p.pp. 21113-21120
  • Arda Secme, Hadi Sedaghat Pisheh, Uzay Tefek, H. Dilara Uslu, Berk Kucukoglu, Ceren Alatas, Mehmet Kelleci, M. Selim Hanay (2023). "On-chip flow rate sensing via membrane deformation and bistability probed by microwave resonators",
    Microfluidics and Nanofluidics
    , v.27,(28)
  • Arda Secme, Uzay Tefek, Burak Sari, Hadi Sedaghat Pisheh, H. Dilara Uslu, Ozge Akbulut, Berk Kucukoglu, R. Tufan Erdogan, Hashim Alhmoud, Ozgur Sahin, M. Selim Hanay (2023). "High Resolution Dielectric Characterization of Single Cells and Microparticles Using Integrated Microfluidic Microwave Sensors",
    IEEE Sensors
    , v.vol. 23,(no. 7,) p.pp. 6517-6529
  • H Alhmoud, M Alkhaled, BE Kaynak, MS Hanay (2023). "Leveraging the Elastic Deformability of Polydimethylsiloxane Microfluidic Channels for Efficient Intracellular Delivery",
    Lab on a Chip
    , v.23 p.714-726, DOI:
  • R. Tufan Erdogan, Mohammed Alkhaled, Batuhan E. Kaynak, Hashim Alhmoud, Hadi S. Pisheh, Mehmet Kelleci, Ilbey Karakurt, Cenk Yanik, Z. Betul Sen, Burak Sari, Ahmet M. Yagci, Aykut Ozkul, M. Selim Hanay (2022). "Atmospheric Pressure Mass Spectrometry of Single Viruses and Nanoparticles by Nanoelectromechanical Systems",
    ACS Nano
    , v.16(3,) p.3821–3833, DOI:
  • C Ti, JG McDaniel, A Liem, H Gress, M Ma, S Kyoung, O Svitelskiy, C Yanik, II Kaya, MS Hanay, M González, KL Ekinci (2022). "Dynamics of NEMS resonators across dissipation limits",
    Applied Physics Letters
    , v.121(2) p.023506, DOI:
  • C Ti, AB Ari, MC Karakan, C Yanik, II Kaya, MS Hanay, O Svitelskiy, M Gonzalez, H Seren, KL Ekinci (2021). "Frequency-Dependent Piezoresistive Effect in Top-down Fabricated Gold Nanoresistors",
    Nano Letters ,
    , v.21(15,) p.6533–6539, DOI:
  • AB Ari, MS Hanay, MR Paul, KL Ekinci (2021). "Nanomechanical Measurement of the Brownian Force Noise in a Viscous Liquid",
    Nano Letters ,
    , v.21(1,) p.375–381, DOI:
  • Y Kilinc, MC Karakan, Y Leblebici, MS Hanay, BE Alaca (2020). "Observation of Coupled Mechanical Resonance Modes within Suspended 3D Nanowire Arrays",
    (12,) p.22042-22048, DOI: DOI
  • E Orhan, M Yuksel, AB Ari, C Yanik, U Hatipoglu, A Yağcı, MS Hanay (2020). "Performance of Nano-Electromechanical Systems as Nanoparticle Position Sensors",
    Frontiers in Mechanical Engineering ,
    (6) p.37, DOI:
  • SO Erbil, U Hatipoglu, C Yanik, M Ghavami, AB Ari, M Yuksel, MS Hanay (2020). "Full Electrostatic Control of Nanomechanical Buckling",
    Physical Review Letters ,
    , v.2020(124) p.046101 (Editor's Selection and Highlighted in APS Physics Webpage), DOI:
  • A Demir, MS Hanay (2020). "Fundamental Sensitivity Limitations of Nanomechanical Resonant Sensors due to Thermomechanical Noise",
    IEEE Sensors ,
    , v.20(4) p.1947, Full Text, DOI:
  • M Yuksel, E Orhan, C Yanik, AB Ari, A Demir, MS Hanay (2019). "Nonlinear Nanomechanical Mass Spectrometry at the Single-Nanoparticle Level",
    Nano Letters ,
    , v.19 p.3583-3589, Full Text, DOI:
  • AB Ari, CM Karakan, C Yanık, II Kaya, MS Hanay (2018). "Intermodal Coupling as a Probe for Nanomechanical Modes",
    Physical Review Applied
    , v.9(034024), Full Text, DOI:
  • M Kelleci, H Aydogmus, L Aslanbas, SO Erbil, MS Hanay (2018). "Towards Microwave Imaging of Cells",
    Lab on a Chip. ,
    , v.18(463), Full Text, DOI: 10.1039/C7LC01251A
  • JE Sader, MS Hanay, AP Neumann, ML Roukes (2018). "Mass Spectrometry Using Nanomechanical Systems: Beyond the Point-Mass Approximation",
    Nano Letters
    , v.18 p.1608-1614, Full Text, DOI: 10.1021/acs.nanolett.7b04301
  • MN Esfahani, Y. Kilinc, Y., MC Karakan, E Orhan, MS Hanay, Y Leblebici, BE Alaca (2018). "Piezoresistive Silicon Nanowire Resonators as Embedded Building Blocks in Thick SOI",
    Journal of Micromechanics and Microengineering
    , v.28(045006)
  • A Demir and MS Hanay (2018). "Numerical Analysis of Multi-Domain Systems: Coupled Nonlinear PDEs & DAEs with Noise",
    IEEE Transactions on CAD
    , v.37(7)
  • T Kouh, MS Hanay, KL Ekinci (2017). "Nanomechanical Motion Transducers for Miniaturized Mechanical Systems",
    , v.8(4) p.108
  • Eric Sage,, Ariel Brenac,, Thomas Alava,, Robert Morel,, Cecilia Dupre,, Selim Hanay,, Michael L. Roukes,, Laurent Duraffourg,, Christophe Masselon,, Sébastien Hentz (2015). "Neutral particle mass spectrometry with nanomechanical systems",
    Nature Communications
    , v.6(6482), Full Text
  • Nyffeler, C., Hanay, S., Sacchetto, D., Leblebici, Y. (2015). "Graphene field effect devices operating in differential circuit configuration",
    Microelectronic Engineering
    , Full Text, DOI:
  • Hanay, S., Kelber, S.I., O'Connell, C.D., Mulvaney, P., Sader, J.E., Roukes, M.L. (2015). "Inertial Imaging with Nanomechanical Systems",
    Nature Nanotechnology
    , Full Text, DOI:
  • Hanay, S., Kelber, S., Naik, A., Chi, D., Hentz, S., Bullard, C., Colinet, E., Duraffourg, L., Roukes, M. (2012). "Single-Protein Nanomechanical Mass Spectrometry in Real Time",
    Nature Nanotechnology
    , v.7 p.602, Full Text
  • Naik, A., Hanay, S., Hiebert, W., Feng, X., Roukes, M. (2009). "Towards Single-Molecule Nanomechanical Mass Spectrometry",
    Nature Nanotechnology
    , v.4 p.445, Full Text
  • Roukes, M., Hanay, S., Kelber, S., Naik, A.. "Single-Protein Nanomechanical Mass Spectrometry in Real Time (US Patent Application filed on 9 May 2013, CIT-6192-P, 2012)"
  • Roukes, M., Naik, A., Hanay, S.. "Single Molecule Mass Spectrometry Enabled by Nanoelectromechanical Systems (NEMS-MS), US Patent # 8,227,747"